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[Business Introduction] Modular Process System

The system features modular design! It can accommodate long-term changes according to technology and productivity.

Our company has over 50 years of experience in building systems for industrial production and research and development. Leveraging this specialized know-how, we have supplied hundreds of vacuum deposition systems for relatively small substrates to our customers. With our modular systems, we can provide customized solutions for wafer-based products, three-dimensional shaped products, substrates with a deposition width of less than 1,000 mm in batch processes, drum-type deposition devices, cluster-type, or inline systems. 【Other Businesses (Partial)】 ■ Glass deposition for building materials and mobility ■ Thin-film solar cells ■ Crystalline solar cells ■ Flexible substrates ■ Special applications *For more details, please refer to the PDF materials or feel free to contact us.

  • Wafer

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